The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2014
Filed:
Dec. 21, 2010
Applicants:
Kazuhito Watanabe, Tama, JP;
Yukihito Tashiro, Chofu, JP;
Naoyuki Nozawa, Inagi, JP;
Daisuke Kobinata, Tokyo, JP;
Hideo Mano, Chofu, JP;
Inventors:
Kazuhito Watanabe, Tama, JP;
Yukihito Tashiro, Chofu, JP;
Naoyuki Nozawa, Inagi, JP;
Daisuke Kobinata, Tokyo, JP;
Hideo Mano, Chofu, JP;
Assignee:
Canon Anelva Corporation, Kawasaki-Shi, Kanagawa-Ken, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02K 5/10 (2006.01); H02K 3/00 (2006.01); H01L 21/677 (2006.01); H02K 5/128 (2006.01);
U.S. Cl.
CPC ...
H02K 5/128 (2013.01); H01L 21/67742 (2013.01);
Abstract
A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.