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For the Inventor, By the Inventor

Kumagaya, Japan

Yukiharu Okubo

This inventor holds 18 USPTO granted patents. Top assignees: Nikon Corporation, Ebara Corporation, Other. Active years: 1997-2014.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yukiharu Okubo. Retrieved from https://idiyas.com/inventor/yukiharu-okubo

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 18

% Patents Active = 88.9

Average Co-Inventor Count = 2.3

ph-index = 8

Forward Citations = 191(Granted Patents)


Location History:

  • Kawasaki, JP (1997 - 2005)
  • Tokyo, JP (2003 - 2005)
  • Saitama, JP (2007 - 2008)
  • Kumagaya, JP (2002 - 2014)

Company Filing History:

goldMedal14 out of 8,995 
 
Nikon Corporation
 patents
silverMedal2 out of 2,576 
 
Ebara Corporation
 patents
bronzeMedal2 out of 834,513 
Other
 patents

Years Active: 1997-2014

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18 patents (USPTO):Explore Patents
1. 8921812 - Reticle protection member, reticle carrying device, exposure device and method for carrying reticle (2014-12-30),
2. 8168959 - Reticle protection member, reticle carrying device, exposure device and method for carrying reticle (2012-05-01),
3. 7453549 - Reticle protection member, reticle carrying device, exposure device and method for carrying reticle (2008-11-18),
4. 7439502 - Electron beam apparatus and device production method using the electron beam apparatus (2008-10-21),
5. 7244932 - Electron beam apparatus and device fabrication method using the electron beam apparatus (2007-07-17),
6. 6977377 - Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus (2005-12-20),
7. 6953944 - Scanning device and method including electric charge movement (2005-10-11),
8. 6900878 - Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same (2005-05-31),
9. 6781123 - Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus (2004-08-24),
10. 6735867 - Method of making a static pressure air bearing (2004-05-18),
11. 6670602 - Scanning device and scanning method (2003-12-30),
12. 6583597 - Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same (2003-06-24),
13. 6566658 - Charged particle beam control element, method of fabricating charged particle beam control element, and charged beam apparatus (2003-05-20),
14. 6499880 - Static pressure air bearing (2002-12-31),
15. 6351041 - Stage apparatus and inspection apparatus having stage apparatus (2002-02-26),

Title: Innovations of Yukiharu Okubo

Introduction

Yukiharu Okubo is a prominent inventor based in Kumagaya, Japan. He has made significant contributions to the field of technology, particularly in the development of devices related to reticle handling and exposure systems. With a total of 18 patents to his name, Okubo's work has had a substantial impact on the industry.

Latest Patents

Among his latest patents are innovations such as the reticle protection member, reticle carrying device, and exposure device and method for carrying reticle. These inventions focus on a position measurement device that accurately measures the position of a measurement mark formed on the lower surface of a reticle. This technology allows for precise positioning of the reticle and lower lid, ensuring that the reticle can be correctly set in the exposure device. The advancements in these patents enhance the efficiency and accuracy of exposure processes in various applications.

Career Highlights

Throughout his career, Yukiharu Okubo has worked with notable companies, including Nikon Corporation and Ebara Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in the field.

Collaborations

Okubo has collaborated with esteemed colleagues such as Muneki Hamashima and Yoshiaki Kohama. Their combined expertise has fostered an environment of innovation and creativity, leading to the development of advanced technologies.

Conclusion

Yukiharu Okubo's contributions to the field of technology through his patents and collaborations highlight his role as a leading inventor. His work continues to influence the industry and pave the way for future innovations.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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