The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Oct. 13, 2000
Yukiharu Okubo, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An object is to provide a charged particle beam control element that enables connection of voltage-applying wires with electrodes in simple structure while maintaining high accuracy of surfaces of the electrodes formed on an insulator by a surface treatment of plating or the like. A charged particle beam control element according to the present invention is provided with a cylindrical base having electrode portions formed on an internal surface thereof, and insulating portions which are disposed at locations not exposed to a passing area of a charged particle beam surrounded by the internal surface and which separate the electrode portions from each other.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile