The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
Jul. 27, 2000
Yukiharu Okubo, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A table moving within a plane parallel with respect to a guide plane of a base is located within an opening of a moveable frame moving along the guide plane so as to be guided in an X-direction by an X-direction guide. The table moves in a Y-direction within the moveable frame. The base member and the moveable frame, the moveable frame and a guide, and the base member and said table member are maintained in a state of non-contact by a hydrostatic pressure gas bearing. A planar motor is comprised of electromagnets provided at the base member and permanent magnets provided at the lower surface of said table member installed on the guide plane for the base. The moveable frame and the table are then levitated and moved in the XY directions by the planar motor.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile