The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Sep. 22, 2008
Motoko Suzuki, Fukaya, JP;
Yukiharu Okubo, Kumagaya, JP;
Motoko Suzuki, Fukaya, JP;
Yukiharu Okubo, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A position measurement devicemeasures the position of a position measurement markformed on the lower surface of a reticle, thereby measuring the position of the reticle. A position measurement devicemeasures the position of the position measurement markformed on the lower surface of a lower lid, thereby measuring the position of the lower lid. The relative displacement of the reticleand lower lidis known when the position of the reticleand the position of the lower lidare known. Therefore, when the lower lidhaving the reticleloaded thereon is carried with a carrying device and set in an exposure device, the stop position of the lower lidis determined by taking this displacement into account. As a result, the reticlecan be correctly set in the exposure device.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile