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Yuan-Yen Lo

USPTO Granted Patents = 7

Average Co-Inventor Count = 3.6

ph-index = 1

Forward Citations = 3(Granted Patents)

Location History:

Hsin-Chu, TW (2018)
Taipei, TW (2017 - 2023)

Company Filing History:

7 out of 40,635

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2017-2025

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12204248 - Surface charge release in lithography developing process (2025-01-21),

2. 11621191 - Method for fabricating a semiconductor device (2023-04-04),

3. 11022898 - Apparatus for EUV lithography and method of measuring focus (2021-06-01),

4. 10879119 - Method for fabricating a semiconductor device (2020-12-29),

5. 10451979 - Apparatus for EUV lithography and method of measuring focus (2019-10-22),

6. 9905471 - Integrated circuit structure and method forming trenches with different depths (2018-02-27),

7. 9711420 - Inline focus monitoring (2017-07-18),

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