Location History:
- Miyagi, JP (2017 - 2020)
- Shanghai, CN (2021)
Company Filing History:
Years Active: 2017-2021
Title: Yu Nagatomo: Innovator in Workpiece Processing Technologies
Introduction
Yu Nagatomo is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of workpiece processing, holding a total of five patents. His innovative methods have advanced the techniques used in the manufacturing industry.
Latest Patents
One of Yu Nagatomo's latest patents is a workpiece processing method that involves forming a ruthenium film on a workpiece. This method includes disposing of a mask on the ruthenium film and etching the film through plasma processing. The process also involves forming a protective film on the workpiece using an atomic layer deposition method. This protective film consists of a first region that extends along the side wall surface of the mask and a second region that covers the ruthenium film. The etching process is designed to remove the second region while retaining the first region. Additionally, the etching of the ruthenium film is performed in two steps, alternating between using an oxygen-containing gas and a chlorine-containing gas.
Another notable patent by Nagatomo describes a method where a tungsten film is formed on a workpiece that includes an underlying film and a mask. The tungsten film has a first region that extends along the side wall surface of the mask and a second region that extends on the underlying film. The tungsten film is then plasma-etched while leaving the first region intact. This innovative approach enhances the precision of workpiece processing.
Career Highlights
Yu Nagatomo has worked with notable companies such as Tokyo Electron Limited. His experience in these organizations has allowed him to refine his skills and contribute to advancements in workpiece processing technologies.
Collaborations
Yu has collaborated with esteemed colleagues, including Yoshihide Kihara and Takahiko Kato. Their combined expertise has fostered innovation in their respective fields.
Conclusion
Yu Nagatomo's contributions to workpiece processing methods demonstrate his commitment to innovation and excellence in engineering. His patents reflect a deep understanding of advanced manufacturing techniques, positioning him as a key figure in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.