Company Filing History:
Years Active: 2014-2024
Title: Yu-Lung Yang: Innovator in Semiconductor Processing
Introduction
Yu-Lung Yang is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 4 patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of substrate and wafer processing.
Latest Patents
Among his latest patents is an "Apparatus for processing substrates or wafers." This vacuum apparatus includes process chambers and a transfer chamber that is coupled to the process chambers. The transfer chamber features one or more vacuum ports for exhausting gas and vent ports for supplying vent gas. The arrangement of these ports is designed to ensure that air flows symmetrically, enhancing the processing capabilities. Another notable patent is the "Method for mandrel and spacer patterning." This method involves forming mandrel patterns over a substrate, depositing a spacer layer, and then trimming and etching the spacer layer to create a patterned spacer layer on the mandrel patterns. This innovative approach allows for precise patterning in semiconductor manufacturing.
Career Highlights
Yu-Lung Yang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to develop and refine his innovative techniques, contributing to advancements in semiconductor technology.
Collaborations
Throughout his career, Yu-Lung Yang has collaborated with notable colleagues, including Yu Chao Lin and Chao-Cheng Chen. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Yu-Lung Yang's contributions to semiconductor processing through his patents and collaborative efforts highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor technology.