Kaohsiung, Taiwan

Yu-Chia Liu


Average Co-Inventor Count = 3.5

ph-index = 5

Forward Citations = 105(Granted Patents)


Company Filing History:


Years Active: 2010-2024

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22 patents (USPTO):

Title: Yu-Chia Liu: Innovator in CMOS-MEMS Technology

Introduction

Yu-Chia Liu is a prominent inventor located in Kaohsiung, Taiwan. With a remarkable portfolio of 22 patents, he has made significant contributions to the field of microelectromechanical systems (MEMS), particularly in the area of thin film encapsulation. His innovative work has garnered attention and respect within the semiconductor industry, illustrating the importance of research and development in advancing technology.

Latest Patents

One of Yu-Chia Liu's latest patents revolves around a novel method and structure for CMOS-MEMS thin film encapsulation. This invention includes representative methods for sealing MEMS devices, which involve depositing insulating material over a substrate. Additionally, it incorporates the formation of conductive vias in a first set of layers of the insulating material and metal structures in a second set of layers. These layers are interleaved to enhance the integrity of the encapsulated structure. A unique aspect of this invention is the inclusion of a dummy insulating layer, which serves as the uppermost layer for the first set. The etching process creates void regions in the insulating material, followed by the formation of a conductive pad on the top surface. Finally, the sealed void regions are protected by an encapsulating structure, ensuring durability and functionality.

Career Highlights

Yu-Chia Liu has held significant roles in reputable companies such as Taiwan Semiconductor Manufacturing Company Ltd. and Phison Electronics Corporation. His tenure at these organizations has allowed him to drive advancements in semiconductor technologies and contribute to numerous pioneering projects in MEMS.

Collaborations

Throughout his career, Liu has collaborated with talented individuals, including Chia-Hua Chu and Chun-Wen Cheng. These collaborations have fostered a creative environment, further enhancing the development of innovative solutions in the high-tech sector.

Conclusion

In summary, Yu-Chia Liu is a leading inventor in the field of CMOS-MEMS technology, with an impressive array of patents that reflect his dedication to innovation. His work and collaborations continue to influence advancements in the semiconductor industry, paving the way for future technological breakthroughs.

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