This inventor holds 3 USPTO granted patents. Top assignee: United Microelectronics Corp.. Active years: 2001-2002.
Company Filing History:
Years Active: 2001-2002
Title: Innovations by Yu-Chang Chow
Introduction
Yu-Chang Chow is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of etching processes. With a total of 3 patents to his name, Chow's work has had a considerable impact on the efficiency and effectiveness of etching chambers.
Latest Patents
Chow's latest patents include a "Method for cleaning interior of etching chamber" and a "Waferless seasoning process." The first patent describes a process for cleaning the interior walls of a reaction chamber after silicon wafers have been etched inside. This innovative cleaning process involves bombarding the chamber's walls with a first type of plasma during a dry cleaning operation, followed by a second type of plasma containing hydrogen in a warm-up operation. Notably, no silicon wafers need to be placed inside the chamber during these operations. The second patent outlines a waferless seasoning process suitable for an etching chamber when the etching environment is compromised. This process employs a dry cleaning method using plasma formed by oxygen and hydrogen bromide to restore the etching environment.
Career Highlights
Yu-Chang Chow is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to develop and refine his innovative techniques in etching processes.
Collaborations
Chow has collaborated with several talented individuals in his field, including Wen-Hua Cheng and Hung-Chen Yu. These collaborations have contributed to the advancement of technology in semiconductor manufacturing.
Conclusion
Yu-Chang Chow's contributions to the field of semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry positively.