Company Filing History:
4 out of 355 
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1 out of 1 Years Active: 2004-2011
Title: Innovations of Yoshiyuki Ooba
Introduction
Yoshiyuki Ooba is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of metal film production, holding a total of 7 patents. His work focuses on advanced methods and apparatuses that enhance the efficiency and quality of metal film production.
Latest Patents
Ooba's latest patents include a barrier metal film production apparatus and method, as well as a metal film production method and apparatus. In his barrier metal film production method, a Cl gas plasma is generated within a chamber between a substrate and a metal member. The metal member is etched with the Cl gas plasma to form a precursor. Excited nitrogen gas is introduced separately, leading to the formation of a metal nitride film on the substrate. This innovative approach allows for the production of a barrier metal film with excellent burial properties and minimal thickness, while suppressing metal diffusion and improving adhesion.
His metal film production apparatus utilizes a copper plate member that is etched with Cl gas plasma to create a precursor. The temperatures of both the copper plate member and the substrate are carefully controlled to facilitate the deposition of the Cu component on the substrate, forming a Cu film. This apparatus is designed for high film formation speed, cost-effectiveness, and minimal impurities in the final product.
Career Highlights
Throughout his career, Yoshiyuki Ooba has worked with notable companies such as Canon Anelva Corporation and Mitsubishi Heavy Industries Limited. His experience in these organizations has contributed to his expertise in the field of metal film production.
Collaborations
Ooba has collaborated with several professionals in his field, including Hitoshi Sakamoto and Naoki Yahata. These collaborations have further enriched his work and innovations.
Conclusion
Yoshiyuki Ooba's contributions to metal film production through his innovative patents and career achievements highlight his importance in the field. His work continues to influence advancements in technology and manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.