YongGyu Han

Title: Innovations of YongGyu Han

Introduction

YongGyu Han is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of material science, particularly in the area of vapor deposition technologies. With a total of four patents to his name, Han's work has advanced the methods of selectively depositing materials, which are crucial for various applications in electronics and materials engineering.

Latest Patents

One of YongGyu Han's latest patents is focused on the selective deposition of material comprising silicon and oxygen using plasma. This patent describes methods and vapor deposition assemblies for selectively depositing material on a substrate's surface through a cyclic deposition process. The process involves providing a substrate in a reaction chamber, introducing a metal or metalloid catalyst in vapor phase, and using a silicon precursor that includes an alkoxy silane compound. The introduction of plasma into the chamber generates reactive species that facilitate the formation of silicon-oxygen materials on the substrate. Additionally, the methods may include subcycles to adjust the proportions of material components for enhanced performance.

Another notable patent is related to a substrate processing apparatus designed to eliminate signal interference between reactors. This apparatus consists of a first reactor and a second reactor positioned adjacent to each other, along with a power generator that supplies power to both reactors. The power generator is engineered to synchronize the phases of the power supplied to each reactor, ensuring efficient operation and improved results.

Career Highlights

YongGyu Han is currently employed at ASML IP Holding B.V., a company known for its cutting-edge technology in the semiconductor industry. His role involves developing innovative solutions that enhance the efficiency and effectiveness of material deposition processes. Han's expertise in this field has positioned him as a valuable asset to his organization.

Collaborations

Throughout his career, YongGyu Han has collaborated with notable colleagues, including KiChul Um and JeungHoon Han. These collaborations have fostered a productive environment for innovation and have contributed to the advancement of their shared research interests.

Conclusion

YongGyu Han's contributions to the field of material science through his patents and innovative work at ASML IP Holding B.V. highlight his significant role as an inventor. His advancements in vapor deposition technologies are paving the way for future developments in the industry.