The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Sep. 30, 2019
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
KiChul Um, Osan-si, KR;
JeungHoon Han, Yongin-si, KR;
DooHan Kim, Cheonan-si, KR;
YongGyu Han, Seoul, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/46 (2013.01); H01J 37/32651 (2013.01); H01J 37/32715 (2013.01);
Abstract
A substrate support unit for thin film deposition on a substrate including a pattern structure and a thin film deposition apparatus including the substrate support unit includes a heater; an RF electrode; a first rod connected to the heater; a second rod connected to the RF electrode; and an RF shield spaced apart from the second rod, disposed to surround the second rod, and extending in an extension direction of the second rod.