This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Asm IP Holding B.v.. Active years: 2022-2026.
Company Filing History:
Years Active: 2022-2026
Title: Innovations of JeungHoon Han in Thin Film Deposition Technology
Introduction
JeungHoon Han is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of thin film deposition technology, holding two patents that showcase his innovative approach to substrate processing.
Latest Patents
His latest patents include a substrate support unit and a thin film deposition apparatus that incorporates this unit. The substrate support unit is designed for thin film deposition on substrates with a pattern structure. It features a heater, an RF electrode, a first rod connected to the heater, a second rod connected to the RF electrode, and an RF shield that surrounds the second rod. Additionally, he has developed a thin film deposition method that involves supplying RF power through a component located below the substrate. This method facilitates the formation of a thin film on the substrate's exposed surface by moving active species into the reaction space.
Career Highlights
JeungHoon Han is currently employed at ASM IP Holding B.V., where he continues to advance his research and development efforts in thin film technologies. His work has been instrumental in enhancing the efficiency and effectiveness of thin film deposition processes.
Collaborations
He collaborates with talented individuals such as KiChul Um and DooHan Kim, contributing to a dynamic research environment that fosters innovation.
Conclusion
JeungHoon Han's contributions to thin film deposition technology reflect his expertise and commitment to advancing the field. His patents and collaborative efforts position him as a key figure in the industry.