The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Mar. 09, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
KiChul Um, Osan-si, KR;
YongGyu Han, Seoul, KR;
SangJean Jeon, Suwon-si, KR;
DooHan Kim, Hwaseong-si, KR;
SangYeop Lee, Hwaseong-si, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/505 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32137 (2013.01); C23C 16/505 (2013.01); H01J 37/32183 (2013.01); H01J 37/32889 (2013.01); H01J 37/32899 (2013.01); H01J 37/32926 (2013.01); H01J 37/32091 (2013.01); H01J 37/32577 (2013.01);
Abstract
A substrate processing apparatus capable of removing signal interference between reactors includes: a first reactor, a second reactor adjacent to the first reactor, and a power generator configured to supply first power to the first reactor and supply second power to the second reactor, wherein the power generator is further configured to synchronize phases of the first power and the second power.