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Xin-Zhu, Taiwan

Ying Ying Wang

USPTO Granted Patents = 9 (Patent Applications = 1)

Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 21(Granted Patents)

Location History:

Xin-Zhu, TW (2014 - 2017)
Hsinchu, TW (2017 - 2024)

Company Filing History:

9 out of 40,635

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2014-2024

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9 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11966170 - Lithographic overlay correction and lithographic process (2024-04-23),

2. 10831110 - Lithographic overlay correction and lithographic process (2020-11-10),

3. 9772561 - Semiconductor manufacturing method and tool (2017-09-26),

4. 9659128 - Semiconductor overlay production system and method (2017-05-23),

5. 9646902 - Paired edge alignment (2017-05-09),

6. 9646896 - Lithographic overlay sampling (2017-05-09),

7. 9104831 - Semiconductor overlay production system and method (2015-08-11),

8. 8860941 - Tool induced shift reduction determination for overlay metrology (2014-10-14),

9. 8703368 - Lithography process (2014-04-22),

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