This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2005-2011.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2005-2011
Title: Yih Song Chiu: Innovator in Semiconductor Technology
Introduction
Yih Song Chiu is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to solving complex engineering challenges.
Latest Patents
Chiu's latest patents include a method for feature dimension measurement. This method involves providing a substrate and forming a reflective layer over it. A dielectric layer is then created, which includes a grating pattern and a resistivity test line inset in a transparent region. Radiation is directed onto the dielectric layer, allowing some of it to transmit through the transparent region to the reflective layer. The resulting radiation pattern is analyzed to determine first dimensional information. Additionally, the resistance of the resistivity test line is measured to ascertain second dimensional information, which is then compared to the first.
Another significant patent by Chiu is a method of forming a shallow trench isolation (STI) feature to avoid electrical charge leakage. This method includes providing a substrate with an overlying hardmask layer, patterning the hardmask layer to create an opening for etching a trench, and carrying out a wet chemical oxidizing process. The process results in a completed planarized STI structure filled with oxide, enhancing the performance and reliability of semiconductor devices.
Career Highlights
Yih Song Chiu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on advancing technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Chiu collaborates with talented coworkers, including Pin Chia Su and Kuo-Hsiu Wei. Their combined expertise contributes to the innovative environment at Taiwan Semiconductor Manufacturing Company Limited.
Conclusion
Yih Song Chiu's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the field. His methods for measuring dimensional characteristics and forming STI structures are vital for the advancement of semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile