Kanagawa, Japan

Yicheng Li


Average Co-Inventor Count = 1.4

ph-index = 9

Forward Citations = 2,252(Granted Patents)


Location History:

  • Kanagawa, JP (2002 - 2005)
  • Shiroyama-Machi, JP (2005)
  • Tsukui-gun, JP (2002 - 2006)
  • Narashino, JP (2009)
  • Kai, JP (2010)
  • Schenectady, NY (US) (2013)

Company Filing History:


Years Active: 2002-2013

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14 patents (USPTO):Explore Patents

Title: Yicheng Li: Innovator in Vapor Deposition Technology

Introduction

Yicheng Li is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of vapor deposition technology, holding a total of 14 patents. His innovative work focuses on methods and systems that enhance the efficiency and effectiveness of processing systems.

Latest Patents

Li's latest patents include a method and system for sealing a first assembly to a second assembly of a processing system. This invention involves a method, computer-readable medium, and system for vapor deposition on a substrate. The system maintains a first assembly at a first temperature while keeping a second assembly at a reduced temperature. This configuration allows for the effective deposition of materials on the substrate while ensuring vacuum isolation between the process and transfer spaces. Another notable patent is a sealing device and method for a processing system, which describes a sealing device that provides vacuum isolation between the process space and the transfer space. This device features contact ridges with pockets that trap gas, assisting in the release of the sealing device upon disengagement.

Career Highlights

Yicheng Li is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing vapor deposition technologies, which are critical for the production of various electronic components.

Collaborations

Li has collaborated with notable coworkers, including Takashi Shigeoka and Takeshi Sakuma. Their combined expertise has contributed to the successful development of innovative technologies in their field.

Conclusion

Yicheng Li's contributions to vapor deposition technology and his impressive portfolio of patents highlight his role as a key innovator in the industry. His work continues to influence advancements in processing systems, showcasing the importance of innovation in technology.

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