Transfer apparatus and method for semiconductor process and semiconductor processing system

Abstract

A transfer apparatus () for a semiconductor processing system includes a transfer member () having a support portion () to place a target substrate (W) thereon, and a drive unit () for driving the transfer member (). A reference mark () is disposed adjacent to the support portion (). The target substrate (W) has optically observable first and second portions (). A storage section () stores a normal image that shows a positional correlation between the reference mark () and the first and second portions (), obtained when the target substrate (W) is placed on the support portion () at a normal position. An image pick-up device (A) takes a detection image that shows a positional correlation between the reference mark () and the first and second portions (), when the transfer member () transfers the target substrate (W). An information processing unit (B) obtains a misalignment amount of the target substrate (W) relative to the normal position, based on the normal image and the detection image.