The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Jan. 23, 2002
Lin Sha, Tsukui-gun, JP;
Yicheng LI, Tsukui-gun, JP;
Lin Sha, Tsukui-gun, JP;
Yicheng Li, Tsukui-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A transfer apparatus () for a semiconductor processing system includes a transfer member () having a support portion () to place a target substrate (W) thereon, and a drive unit () for driving the transfer member (). A reference mark () is disposed adjacent to the support portion (). The target substrate (W) has optically observable first and second portions (). A storage section () stores a normal image that shows a positional correlation between the reference mark () and the first and second portions (), obtained when the target substrate (W) is placed on the support portion () at a normal position. An image pick-up device (A) takes a detection image that shows a positional correlation between the reference mark () and the first and second portions (), when the transfer member () transfers the target substrate (W). An information processing unit (B) obtains a misalignment amount of the target substrate (W) relative to the normal position, based on the normal image and the detection image.