This inventor holds 4 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2015-2018.
Company Filing History:
Years Active: 2015-2018
Title: Innovations of Yi-Hann Chen in Semiconductor Technology
Introduction
Yi-Hann Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of wafer processing systems.
Latest Patents
Among his latest innovations are two notable patents related to high-throughput systems for post-implantation wafer warming. The first patent describes a system that includes an implantation chamber and a warming chamber, which is designed to be outside the implantation chamber. This system features a first robotic arm that moves a first wafer from the implantation chamber into the warming chamber, and a second robotic arm that transfers a second wafer into the implantation chamber. The second patent elaborates on a high-throughput system that uniformly warms a single wafer after a low-temperature implantation process. This system utilizes multiple robotic arms to handle several wafers simultaneously, thereby increasing the throughput of the fabrication process. Additionally, the warming chamber can operate in a vacuum environment, which helps to eliminate the mist-condensation problem that can lead to wafer spotting.
Career Highlights
Yi-Hann Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing wafer processing technologies, contributing to the overall efficiency of semiconductor manufacturing.
Collaborations
Some of his notable coworkers include Ming-Te Chen and Kang Hua Chang, who have collaborated with him on various projects within the semiconductor field.
Conclusion
Yi-Hann Chen's innovative patents and contributions to semiconductor technology highlight his expertise and commitment to advancing the industry. His work continues to influence the efficiency of wafer processing systems, making a significant impact on semiconductor manufacturing.