Location History:
- Susono, JP (2014)
- Shizuoka, JP (1981 - 2015)
Company Filing History:
Years Active: 1981-2015
Title: Innovations of Yasushi Higuchi
Introduction
Yasushi Higuchi is a prominent inventor based in Shizuoka, Japan. He has made significant contributions to the field of technology, holding a total of 10 patents. His work primarily focuses on advanced manufacturing methods and apparatuses that enhance device production.
Latest Patents
One of Higuchi's latest patents is a radical etching apparatus and method. This apparatus includes a vacuum chamber for treating substrates, a pipe pathway connected to the vacuum chamber, a zone for generating plasma, and a gas introduction device for introducing nitrogen and at least one of hydrogen and ammonia. The apparatus also features a microwave system that applies microwaves to the interior of the pipe pathway. The method involves introducing nitrogen and at least one of hydrogen and ammonia into the pipe pathway while applying microwaves. The gas mixture is decomposed by plasma, forming active species that react with fluorine during transportation to the vacuum chamber to create radicals. These radicals are used to etch an SiO layer on the substrate by irradiating it through a shower plate.
Another notable patent is related to the manufacturing method and apparatus of a device. This method includes a first process where a barrier film is formed on a substrate with a concave portion, a second process for forming a conductive film over the barrier film, and a third process where the conductive film is melted using a reflow method. The method also incorporates a control process that ensures the product of pressure and time does not exceed a specific threshold.
Career Highlights
Higuchi has worked with several notable companies, including Ihara Chemical Industry Co., Ltd. and Ulvac, Inc. His experience in these organizations has allowed him to refine his skills and contribute to innovative projects in the field of technology.
Collaborations
Throughout his career, Yasushi Higuchi has collaborated with talented individuals such as Yoshiki Nakayama and Chihiro Yazawa. These collaborations have further enriched his work and led to advancements in his inventions.
Conclusion
Yasushi Higuchi's contributions to technology through his patents and collaborations highlight his innovative spirit and dedication to advancing manufacturing methods. His work continues to influence the industry and inspire future inventors.