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Yokohama, Japan

Yasuhiko Sato

USPTO Granted Patents = 15

Average Co-Inventor Count = 3.5

ph-index = 7

Forward Citations = 551(Granted Patents)

Location History:

Kanagawa-ken, JP (1999)
Yokohama, JP (1999 - 2007)
Yokosuka, JP (2003 - 2007)
Yokkaichi, JP (2007)

Company Filing History:

14 out of 52,751

Kabushiki Kaisha Toshiba

Nippon Shokubai Co., Ltd.

Years Active: 1999-2007

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15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7300884 - Pattern forming method, underlayer film forming composition, and method of manufacturing semiconductor device (2007-11-27),

2. 7235490 - Method of manufacturing semiconductor device (2007-06-26),

3. 7198886 - Method for forming pattern (2007-04-03),

4. 6806021 - Method for forming a pattern and method of manufacturing semiconductor device (2004-10-19),

5. 6762325 - Method for production of alkoxylated compound (2004-07-13),

6. 6576562 - Manufacturing method of semiconductor device using mask pattern having high etching resistance (2003-06-10),

7. 6569595 - Method of forming a pattern (2003-05-27),

8. 6465290 - Method of manufacturing a semiconductor device using a polymer film pattern (2002-10-15),

9. 6420271 - Method of forming a pattern (2002-07-16),

10. 6337163 - Method of forming a pattern by making use of hybrid exposure (2002-01-08),

11. 6270948 - Method of forming pattern (2001-08-07),

12. 6054254 - Composition for underlying film and method of forming a pattern using (2000-04-25),

13. 6025117 - Method of forming a pattern using polysilane (2000-02-15),

14. 5994007 - Pattern forming method utilizing first insulative and then conductive (1999-11-30),

15. 5981150 - Method for forming a resist pattern (1999-11-09),

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