The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2002
Filed:
Sep. 21, 1999
Applicant:
Inventor:
Yasuhiko Sato, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 ; G03C 5/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ; G03C 5/00 ;
Abstract
A method of forming a pattern, which comprises the steps of, forming an underlying film on a work film, forming a resist film on the underlying film, exposing the resist film to ultraviolet rays of predetermined pattern, forming a resist pattern by subjecting the resist film to a developing treatment, exposing the underlying film to an electron beam of predetermined pattern, and dry-etching the underlying film with the resist pattern and the region of the predetermined pattern of exposure by means of the electron beam being employed as an etching mask.