Xuguang Jiang

Title: Xuguang Jiang: Innovator in Specimen Alignment and Defect Detection

Introduction

Xuguang Jiang is a prominent inventor based in Sunnyvale, CA, known for his contributions to the fields of specimen alignment and defect detection. With a total of 8 patents to his name, Jiang has made significant advancements that enhance the efficiency and accuracy of inspection processes.

Latest Patents

One of Jiang's latest patents focuses on the alignment of a specimen for inspection and other processes. This patent describes methods and systems for setting up alignment, which includes a computer subsystem configured to acquire two-dimensional (2D) images from a detector. The system determines offsets in the x and y directions between template locations using these images. If the angle of the specimen exceeds a predetermined value, the system rotates the specimen and repeats the alignment steps. If the angle is acceptable, one of the 2D images is stored for future alignment processes. Additionally, Jiang has developed a patent for variation-based segmentation for wafer defect detection. This innovation allows for the separation of defects of interest from nuisance defects by segmenting a region of an image into multiple segments, enabling more precise detection.

Career Highlights

Throughout his career, Jiang has worked with notable companies such as KLA-Tencor Corporation and KLA Corporation. His work in these organizations has contributed to the development of advanced technologies in the semiconductor industry.

Collaborations

Jiang has collaborated with esteemed colleagues, including Yong Zhang and Tong Huang, further enhancing his innovative contributions to the field.

Conclusion

Xuguang Jiang's work in specimen alignment and defect detection showcases his expertise and commitment to innovation. His patents reflect a deep understanding of technology and its application in improving inspection processes.