The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Sep. 17, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventor:
Xuguang Jiang, San Jose, CA (US);
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G06T 7/136 (2017.01); G06T 7/11 (2017.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G06T 7/11 (2017.01); G06T 7/136 (2017.01); G01N 2021/8887 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Defects of interest and nuisance can be separated into different segments which enables detection of the defects of interest in only one segment. A region of an image can be segmented into a plurality of segments. A range attribute of the segments can be determined. Thresholding can be used to select one of the segments from the range attribute. The segment that is selected can be dilated.