This inventor holds 4 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2006-2014.
Company Filing History:
Years Active: 2006-2014
Title: Innovations of Inventor Xingcai Su
Introduction
Xingcai Su is a notable inventor based in Fremont, California. He has made significant contributions to the field of plasma processing technology. With a total of 4 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of Xingcai Su's latest patents is a uniform etch system. This innovation involves etching a layer over a substrate placed in a plasma processing chamber. A first gas is introduced to an inner zone within the chamber, while a second gas is provided to the outer zone, which surrounds the inner zone. The first gas is distinct from the second gas, and plasmas are generated simultaneously from both gases. This process allows for the effective etching of the layer by utilizing the plasmas from both gases.
Career Highlights
Xingcai Su is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop advanced technologies that enhance manufacturing processes.
Collaborations
Throughout his career, Xingcai Su has collaborated with esteemed colleagues, including Peter K. Loewenhardt and Dean Jay Larson. These collaborations have contributed to the advancement of innovative solutions in plasma processing.
Conclusion
Xingcai Su's contributions to the field of plasma processing through his patents and work at Lam Research Corporation highlight his role as a significant inventor. His innovations continue to shape the industry and pave the way for future advancements.