Company Filing History:

27 out of 131,214

Samsung Electronics Co., Ltd.

Pukyong National University

patents

where one patent can have more than one assignee

Years Active: 2006-2023

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27 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11664243 - Substrate processing apparatus (2023-05-30),

2. 11361960 - Substrate processing apparatus and substrate processing system including the same (2022-06-14),

3. 10707071 - Substrate processing apparatus and substrate processing system including the same (2020-07-07),

4. 8790470 - Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods (2014-07-29),

5. 8766343 - Integrated circuit capacitors having sidewall supports (2014-07-01),

6. 8637942 - Transistor having a metal nitride layer pattern, etchant and methods of forming the same (2014-01-28),

7. 8585917 - Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods (2013-11-19),

8. 8119476 - Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby (2012-02-21),

9. 8084367 - Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods (2011-12-27),

10. 8058180 - Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture (2011-11-15),

11. 7985999 - Semiconductor device having capacitor (2011-07-26),

12. 7879735 - Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same (2011-02-01),

13. 7825030 - Method of forming a spacer (2010-11-02),

14. 7820508 - Semiconductor device having capacitor and method of fabricating the same (2010-10-26),

15. 7745338 - Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same (2010-06-29),

Title: Innovations by Woo-Gwan Shim: A Leader in Substrate Processing Technologies

Introduction

Woo-Gwan Shim, located in Yongin-si, South Korea, has made significant strides in the field of substrate processing, holding an impressive portfolio of 27 patents. His innovative approaches contribute greatly to advancements in manufacturing technologies.

Latest Patents

Among his latest patents, Woo-Gwan Shim has developed a substrate processing apparatus that includes a spin chuck for rotating the substrate and various nozzles for applying chemical liquids and deionized water. Additionally, he introduced a laser device capable of emitting a pulsed laser beam for the precise etching of substrate edges. Another notable patent involves a substrate processing apparatus and system that incorporates chambers and dual substrate supports, allowing the efficient application of supercritical fluids for enhanced processing capabilities.

Career Highlights

Woo-Gwan Shim has had a distinguished career, contributing his expertise to esteemed companies such as Samsung Electronics Co., Ltd. and Semes Co., Ltd. His contributions have led to advancements in technologies that are pivotal to the evolution of the electronics manufacturing sector.

Collaborations

Throughout his career, Woo-Gwan has collaborated with talented peers, including Chang-ki Hong and Jeong-Nam Han. These partnerships have fostered a collaborative environment that promotes innovative thinking and the development of cutting-edge technologies.

Conclusion

Woo-Gwan Shim’s contributions to substrate processing technology demonstrate his commitment to innovation. His patents reflect not only his expertise but also his dedication to pushing the boundaries of what is possible in the industry. As the field continues to evolve, innovators like Woo-Gwan play a crucial role in shaping its future.

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