Company Filing History:
Years Active: 1999-2018
Title: Innovations by Wolfram Grundke
Introduction
Wolfram Grundke is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of micro-processing, particularly in the development of mobile dispense devices and lithography techniques. With a total of 7 patents to his name, Grundke's work has had a substantial impact on manufacturing processes.
Latest Patents
One of his latest patents is a mobile dispense device for chemicals used in micro-processing. This invention relates to techniques for supplying different chemical products to process tools in a manufacturing environment. The mobile dispense devices are designed to incorporate necessary hardware components for dispensing chemical products. They are equipped to enable easy coupling to and removal from process tools, such as wafer tracks in modern lithography tools. This modular approach leads to a significant reduction in ownership costs, increased tool availability, and lower investment costs compared to conventional methods.
Another significant patent focuses on methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography. This invention aims to improve reticle CD uniformity by forming a photomask that includes both a main functional pattern and a sub-resolution fill pattern. The fill pattern is designed to not substantially modify the imaging of any structure in the main functional pattern during lithographic exposure.
Career Highlights
Wolfram Grundke has worked with prominent companies in the technology sector, including Advanced Micro Devices Corporation and Globalfoundries Inc. His experience in these organizations has contributed to his expertise in micro-processing and lithography.
Collaborations
Throughout his career, Grundke has collaborated with notable professionals in the field, including Martin Mazur and Khoi A Phan. These collaborations have further enriched his work and innovations.
Conclusion
Wolfram Grundke's contributions to micro-processing and lithography through his innovative patents demonstrate his significant role as an inventor. His work continues to influence the manufacturing landscape, showcasing the importance of innovation in technology.