This inventor holds 9 USPTO granted patents. Top assignees: General Dynamics Corp., Pomona Division, Other. Active years: 1984-1999.
Location History:
- Claremont, CA (US) (1984 - 1985)
- Fullerton, CA (US) (1988 - 1999)
Company Filing History:
6 out of 219 
3 out of 834,411 Years Active: 1984-1999
Title: The Innovations of William R. Yueh
Introduction
William R. Yueh is a notable inventor based in Claremont, CA, with a significant contribution to the field of semiconductor technology. He holds a total of 9 patents, showcasing his expertise and innovative spirit in developing advanced solutions for semiconductor wafer processing.
Latest Patents
Among his latest patents is the "In-situ endpoint control apparatus for semiconductor wafer polishing." This invention utilizes a Kalman filter, which is traditionally used in celestial navigation, to determine the endpoint of a wafer removal process. The integration of line variable displacement transducers allows for position error correction, while the Preston equation provides the initial calibration for endpoint determination, achieving accuracies of fifty angstroms. Another significant patent is the "Slurry recycling system for chemical-mechanical polishing apparatus." This system features an annular-shaped wafer polishing platen that rotates around a non-rotating center core. The slurry dispensing system, located in the center core, directs a slurry mist radially into the path of a moving wafer. The recycling system, positioned at the platen's periphery, is controlled by an endpoint monitoring and control system that provides instantaneous wafer removal rate data to regulate a slurry recycling valve.
Career Highlights
William R. Yueh has worked with General Dynamics Corporation, Pomona Division, where he contributed to various projects that enhanced semiconductor processing technologies. His work has been instrumental in advancing the efficiency and effectiveness of wafer polishing techniques.
Collaborations
One of his notable collaborators is Philip T. Kan, with whom he has worked on various innovative projects in the semiconductor field.
Conclusion
William R. Yueh's contributions to semiconductor technology through his patents and career achievements highlight his role as a significant innovator in the industry. His work continues to influence advancements in wafer processing techniques.