William R Johanson

Title: The Innovations of William R. Johanson in High-Temperature Technologies

Introduction: William R. Johanson, a distinguished inventor based in San Jose, CA, holds an impressive portfolio of 24 patents. His contributions primarily focus on advancements in substrate processing technologies, particularly in the realms of high-temperature and electrostatic chuck applications.

Latest Patents: Among his most recent innovations is the patent for a high-temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for physical vapor deposition (PVD) chambers. This invention features a substrate support design that integrates a base plate assembly and a cooling plate, equipped with multiple electrical feedthroughs. Notably, an electrostatic chuck sits atop this assembly, allowing for efficient substrate handling during processing. Another significant patent involves an apparatus for reducing tungsten resistivity. This device effectively forms low-resistivity tungsten films on substrates by generating a plasma within a PVD chamber, using krypton as a process gas, and applying RF power to achieve precise sputter-deposition of tungsten.

Career Highlights: William R. Johanson has made a notable impact while working at prominent companies in the semiconductor industry, including Applied Materials, Inc. and Novellus Systems Incorporated. His role in these organizations has facilitated the development and commercialization of his innovative technologies, contributing to advancements in the manufacturing processes of semiconductor devices.

Collaborations: Throughout his career, Johanson has collaborated with talented professionals such as Kirankumar Neelasandra Savandaiah and Prashant Prabhakar Prabhu. These partnerships have fostered an environment of creativity and innovation, driving further advancements in their respective fields.

Conclusion: William R. Johanson's innovative spirit and dedication to advancing substrate processing technologies have made a profound impact on the industry. With 24 patents to his name, his inventions continue to pave the way for new developments in high-temperature applications and materials science. His work exemplifies the importance of creativity and collaboration in driving forward the world of technological innovations.