The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Dec. 11, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Thanh X. Nguyen, Fremont, CA (US);
Alexander Jansen, Sunnyvale, CA (US);
Yana Cheng, San Jose, CA (US);
Randal Schmieding, Saratoga, CA (US);
Yong Cao, San Jose, CA (US);
Xianmin Tang, San Jose, CA (US);
William Johanson, Gilroy, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A movable substrate support with a top surface for holding a substrate, when present, is used in conjunction with a cover ring that is stationary to adjust for a shadow effect to control substrate edge uniformity during deposition processes. The cover ring is held stationary by an electrically isolated spacer that engages with a grounded shield in the process volume of a semiconductor process chamber. A controller adjusts the substrate support in response to deposition material on a top surface of the cover ring to maintain the shadow effect and substrate edge uniformity.