Company Filing History:
Years Active: 2001-2016
Title: Innovations of William M Denty, Jr.
Introduction
William M Denty, Jr. is a notable inventor based in San Jose, CA (US). He has made significant contributions to the field of plasma processing technology, holding a total of 10 patents. His work focuses on improving gas flow systems, which are critical in various industrial applications.
Latest Patents
Denty's latest patents include innovative methods for verifying gas flow rates from a gas supply system into a plasma processing chamber. One method involves a differential flow technique where a flow controller operates at different set flow rates. This allows for the measurement of upstream orifice pressures at ambient conditions. These pressures are then referenced to a secondary flow verification method, which generates actual gas flow rates for the different set flow rates. Another patent details a showerhead electrode assembly designed for plasma processing apparatuses. This assembly features gas flow modification to extend electrode life, ensuring efficient operation during plasma processing.
Career Highlights
William M Denty, Jr. is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in advancing plasma processing technologies. His innovative approaches have contributed to the efficiency and effectiveness of gas supply systems in various applications.
Collaborations
Denty has collaborated with notable colleagues, including Dean Jay Larson and Anthony De La Llera. These partnerships have fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
William M Denty, Jr. is a distinguished inventor whose work has significantly impacted the field of plasma processing technology. His innovative patents and contributions to Lam Research Corporation highlight his expertise and commitment to advancing industrial applications.
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