Spicewood, TX, United States of America

William A McGahan

USPTO Granted Patents = 8 

 

Average Co-Inventor Count = 1.9

ph-index = 6

Forward Citations = 160(Granted Patents)


Location History:

  • San Jose, CA (US) (2002)
  • Spicewood, TX (US) (2004 - 2013)

Company Filing History:


Years Active: 2002-2013

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8 patents (USPTO):

Title: **William A. McGahan: Innovator in Asymmetry Metrology and Fourier Analysis**

Introduction

William A. McGahan, an accomplished inventor based in Spicewood, TX, has made significant contributions to the fields of metrology and signal analysis with a total of eight patents to his name. His innovative work focuses particularly on advanced techniques for analyzing asymmetric structures and periodic patterns.

Latest Patents

One of McGahan's latest patents involves **scatterometry measurement of asymmetric structures**. This invention employs various elements of the Mueller matrix, including its off-diagonal elements, to achieve precise asymmetry metrology. The process utilizes a spectroscopic or angle-resolved ellipsometer with a rotating compensator to generate the Mueller matrix. This method allows for overlay analysis on in-chip devices without needing special off-chip targets, offering a streamlined approach in metrology.

Another notable patent of McGahan's is centered on **simulating two-dimensional periodic patterns using compressed Fourier space**. This innovation enhances the modeling process of complex two-dimensional periodic structures by selectively truncating the Fourier expansion. By concentrating on harmonic orders that exceed a specific contribution threshold, this method significantly reduces memory and computation time. It not only enables real-time analysis of samples but also facilitates the creation of libraries for sample analysis.

Career Highlights

William A. McGahan has built an impressive career at Nanometrics Inc., where he continues to push the boundaries of technology and innovation. His focus on asymmetry metrology and Fourier analysis has established him as a key figure in the research community.

Collaborations

Throughout his career, McGahan has collaborated with talented colleagues, including James Matthew Holden and Richard A. Yarussi. Together, they have contributed to advancements in their fields, highlighting the importance of teamwork in the pursuit of innovation.

Conclusion

William A. McGahan exemplifies the spirit of innovation with his groundbreaking patents and contributions in metrology and Fourier analysis. His work not only reflects his expertise but also paves the way for future advancements in these critical fields.

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