Average Co-Inventor Count = 3.9

ph-index = 17

Forward Citations = 885(Granted Patents)

Location History:

San Jose, CA (US) (1994 - 2002)
Incline Village, NV (US) (2002 - 2004)
Palo Alto, CA (US) (1999 - 2005)

Company Filing History:

25 out of 3,768

Lam Research Corporation

Watkins- Johnson Company

where one patent can have more than one assignee

Years Active: 1994-2005

Loading Chart...

35 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6927198 - Methods and apparatus for cleaning semiconductor substrates after polishing of copper film (2005-08-09),

2. 6746320 - Linear reciprocating disposable belt polishing method and apparatus (2004-06-08),

3. 6656025 - Integrated pad and belt for chemical mechanical polishing (2003-12-02),

4. 6621584 - Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing (2003-09-16),

5. 6616772 - Methods for wafer proximity cleaning and drying (2003-09-09),

6. 6594847 - Single wafer residue, thin film removal and clean (2003-07-22),

7. 6517418 - Method of transporting a semiconductor wafer in a wafer polishing system (2003-02-11),

8. 6500056 - Linear reciprocating disposable belt polishing method and apparatus (2002-12-31),

9. 6488040 - Capillary proximity heads for single wafer cleaning and drying (2002-12-03),

10. 6479443 - Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film (2002-11-12),

11. 6428394 - Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed (2002-08-06),

12. 6336845 - Method and apparatus for polishing semiconductor wafers (2002-01-08),

13. 6334229 - Apparatus for cleaning edges of contaminated substrates (2002-01-01),

14. 6328642 - Integrated pad and belt for chemical mechanical polishing (2001-12-11),

15. 6325706 - Use of zeta potential during chemical mechanical polishing for end point detection (2001-12-04),

Title: Innovations by Wilbur C Krusell in Semiconductor Technologies

Introduction

Wilbur C Krusell, based in Palo Alto, CA, is a distinguished innovator with a remarkable portfolio of 35 patents. His contributions primarily focus on advancements in semiconductor technologies, particularly in the cleaning and planarization processes integral to semiconductor manufacturing.

Latest Patents

Among his latest innovations are two notable patents. The first, "Methods and apparatus for cleaning semiconductor substrates after polishing of copper film," introduces a cleaning solution and method that utilizes deionized water, an organic compound, and a fluoride compound in an acidic pH environment. This novel approach significantly enhances the cleaning efficiency of semiconductor substrates post-polishing, effectively addressing issues related to brush loading and contamination.

The second patent, "Linear reciprocating disposable belt polishing method and apparatus," describes an innovative apparatus for chemically mechanically planarizing semiconductor wafers. This invention features a continuous polishing strip with a fixed abrasive surface, supported by a system of drive rollers and support rollers, allowing for bi-directional movement. This design optimizes the planarization process of wafers, enhancing the overall performance in semiconductor manufacturing.

Career Highlights

Wilbur has had a commendable career, contributing his expertise to notable companies such as Lam Research Corporation and Ontrak Systems, Inc. His work in these corporations has significantly impacted the semiconductor industry, driving innovations that improve manufacturing processes.

Collaborations

Throughout his career, Wilbur has collaborated with talented individuals, including coworkers Rahul Jairath and Erik H Engdahl. Their collective expertise has played a crucial role in fostering an environment of creativity and innovation, leading to the development of cutting-edge technologies in semiconductor processing.

Conclusion

Wilbur C Krusell's inventive spirit and dedication to the field of semiconductor technology exemplify the impact of innovation in improving manufacturing processes. His patents not only address current challenges but also pave the way for future advancements, ensuring continued growth in the semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com

Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.