The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2002
Filed:
Jan. 07, 1999
Applicant:
Inventors:
Mansour Moinpour, Cupertino, CA (US);
Hoang T. Nguyen, San Jose, CA (US);
Mohsen Salek, Cupertino, CA (US);
Young C. Park, Mountain View, CA (US);
Tom Bramblett, Hillsboro, OR (US);
John M. deLarios, Palo Alto, CA (US);
Lynn S. Ryle, San Jose, CA (US);
Donald E. Anderson, Morgan Hill, CA (US);
Wilbur C. Krusell, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01B 1/102 ; A46B 1/304 ;
U.S. Cl.
CPC ...
B01B 1/102 ; A46B 1/304 ;
Abstract
An apparatus for cleaning edges of substrates is described. The present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based on friction and/or a difference in tangential velocity at a point of contact between the wafer and the cleaning mechanism.