The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Feb. 14, 1997
Applicant:
Inventors:
Anil K. Pant, Santa Cruz, CA (US);
Rahul Jairath, San Jose, CA (US);
Kamal Mishra, San Jose, CA (US);
Saket Chadda, San Jose, CA (US);
Wilbur C. Krusell, Palo Alto, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 2/104 ; B24B 7/22 ;
U.S. Cl.
CPC ...
B24B 2/104 ; B24B 7/22 ;
Abstract
An integrated pad and belt for polishing a surface comprising a belt integrated with a polishing pad that forms a seamless polishing surface.
Pant, Anil. (2001). Integrated pad and belt for chemical mechanical polishing (U.S. Patent No. 6328642). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6328642
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile