Wen-Hsuan Chen

Title: **Innovative Contributions of Inventor Wen-Hsuan Chen in Semiconductor Technology**

Introduction

Wen-Hsuan Chen, an accomplished inventor based in Hsinchu, Taiwan, has made significant strides in the semiconductor industry. With two patented inventions to his credit, he demonstrates a commitment to advancing technology within his field. His work primarily focuses on enhancing semiconductor device fabrication processes, crucial for improving electronic components' performance.

Latest Patents

Wen-Hsuan Chen's latest patents include innovative methods that are pivotal in the production of semiconductor devices:

1. **Bi-layer Alloy Liner for Interconnect Metallization and Methods of Forming the Same** - This patent outlines a method that includes forming an opening in a dielectric layer and creating a barrier layer within this opening. It details how to create a combined liner layer over the barrier layer by first forming a first liner layer, followed by a second liner layer to allow intermixing. A conductive material layer is placed over this combined liner layer, which undergoes a thermal process to reflow the conductive material, optimizing the interconnect metallization process.

2. **Diffusion Barrier for Semiconductor Device and Method** - This patent describes a systematic approach that involves forming an insulating layer over a conductive feature and etching this insulating layer to expose the conductive feature's surface. It emphasizes the use of a sacrificial material to protect the first surface while covering the sidewalls with a tantalum nitride barrier material that is doped with a transition metal. The process ensures the protection and enhancement of the conductive feature's performance once the sacrificial material is removed.

Career Highlights

Wen-Hsuan Chen currently works at Taiwan Semiconductor Manufacturing Company Limited, a leading organization known for its innovative contributions to the semiconductor manufacturing industry. His career reflects a passion for creating advanced technologies that cater to the needs of an increasingly digital world.

Collaborations

Throughout his career, Wen-Hsuan has collaborated with talented colleagues, including Cheng-Hui Weng and Chia-Pang Kuo. These collaborations have fostered an environment of innovation and creativity, allowing for the sharing of ideas and development of groundbreaking technologies in the semiconductor sector.

Conclusion

Wen-Hsuan Chen's contributions to the semiconductor field, alongside his patented inventions, highlight his role as an inventor dedicated to improving technological processes. With a firm foothold in Taiwan's thriving semiconductor industry, his ongoing work promises lasting impacts that will influence future innovations in electronics and beyond.