Company Filing History:
Years Active: 2025
Title: Wataru Matsumoto: Innovator in Substrate Transfer Technology
Introduction
Wataru Matsumoto is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate transfer technology, holding a total of 5 patents. His work focuses on improving the efficiency and accuracy of substrate processing, which is crucial in various manufacturing sectors.
Latest Patents
Matsumoto's latest patents include an "Apparatus for transferring substrate and method for transferring substrate." This innovative apparatus is designed to transfer a substrate to a substrate processing chamber. It features a substrate transfer chamber with a floor and side wall, a substrate transfer module that utilizes magnetic levitation for movement, and a controller that manages the operating force for the transfer module. The controller is equipped with a parameter storage, a control schedule creating section, and a magnetic force adjusting section for enhanced performance.
Another notable patent is the "Substrate transfer device and method of cooling arm." This device includes a transfer arm with a substrate support, a cooler for distributing a cooling fluid, and a measuring part to monitor the temperature of cooling target regions. The controller calculates a thermal index for each region and determines the distribution ratio of the cooling fluid to maintain optimal movement accuracy.
Career Highlights
Wataru Matsumoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop cutting-edge technologies that enhance substrate processing capabilities.
Collaborations
Matsumoto has collaborated with notable colleagues, including Takehiro Shindo and Dongwei Li. Their combined expertise has contributed to the advancement of substrate transfer technologies.
Conclusion
Wataru Matsumoto's innovative work in substrate transfer technology has led to significant advancements in the field. His patents reflect a commitment to improving manufacturing processes, making him a key figure in the industry.