The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Feb. 28, 2023
Tokyo Electron Limited, Tokyo, JP;
Wataru Matsumoto, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
There is an apparatus for transferring a member to be disposed in a substrate processing chamber between a substrate transfer chamber and the substrate processing chamber adjacent to each other, comprising: a valve body that is attached to and detached from an opening through which the substrate transfer chamber and the substrate processing chamber communicate and is configured to close the opening; a member holding part extending from the valve body into the substrate processing chamber when the opening is closed by the valve body, and configured to transfer the member to a preset arrangement position in the substrate processing chamber; and a moving mechanism configured to move the valve body separated from the opening in the substrate transfer chamber.