The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Aug. 28, 2023
Tokyo Electron Limited, Tokyo, JP;
Wataru Matsumoto, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A detection device according to one embodiment of the present disclosure includes an elastic member, a measuring part and a detection part. The elastic member is disposed between a first member and a second member at a bonding portion where the first member and the second member are bonded and the elastic member is configured to be elastically deformable. The measuring part is configured to measure electrical characteristics at multiple locations of the elastic member. The detecting part is configured to detect deformation of the elastic member based on the electrical characteristics measured at the multiple locations by the measuring part.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile