Waikit Fung

Title: The Innovative Mind of Waikit Fung: A Pioneer in Plasma Etch Technologies

Introduction: Waikit Fung is a distinguished inventor based in Cupertino, California, recognized for his contributions to the field of plasma etching. With a total of three patents to his name, his work has significantly advanced the methodologies and technologies used in semiconductor manufacturing.

Latest Patents: Waikit Fung's latest patents include groundbreaking advancements in biased plasma etch processes that incorporate Hetch chemistries. His recent work focuses on high-density plasma chemical vapor etch-enhanced (deposition-etch-deposition) gap fill processes. These processes utilize hydrogen as the etchant, effectively filling high aspect ratio gaps while minimizing contamination by etchant chemical species. Another notable patent introduces methods for controlling etch process repeatability, enhancing the efficiency of plasma etch processes that also feature hydrogen. This innovative approach allows for addressing high aspect ratios and narrow width gaps, improving wafer-to-wafer uniformity compared to conventional methods.

Career Highlights: Waikit Fung has been an essential asset to Novellus Systems Incorporated, where he has utilized his expertise in plasma etch technologies. His innovative mindset and dedication to research have played a pivotal role in enhancing the company's capabilities in the semiconductor industry. The impact of his inventions is evident in the improved performance and reliability of plasma etching processes.

Collaborations: Throughout his career, Waikit Fung has collaborated with notable colleagues such as Siswanto Sutanto and Wenxian Zhu. These partnerships have fostered an environment of innovation and shared knowledge, leading to the development of groundbreaking technologies in the field. Together, they have made significant strides in enhancing fabrication processes and pushing the boundaries of semiconductor manufacturing.

Conclusion: Waikit Fung's contributions as an inventor continue to influence the semiconductor industry, with his patents setting new standards for plasma etch technologies. His work at Novellus Systems Incorporated and collaborations with esteemed colleagues underline his commitment to innovation and excellence. As he continues to push the envelope in this vital field, Waikit Fung remains a noteworthy figure in the world of inventions and technological advancements.