Ulrich Matejka

This inventor holds 24 USPTO granted patents and 13 published patent applications and 3 EPO patents, primarily in Microlithography Metrology. Top assignees: Carl Zeiss Smt Gmbh, Carl Zeiss Sms Ltd., Carl Zeiss Ag. Active years: 2013-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Ulrich Matejka. Retrieved from https://idiyas.com/inventor/ulrich-matejka

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 24 (Patent Applications = 13)

% Patents Active = 100.0

EPO Patents = 3 (Patent Applications = 3)

Average Co-Inventor Count = 3.2

ph-index = 3

Forward Citations = 26(Granted Patents)

Company Filing History:

where one patent can have more than one assignee

Years Active: 2013-2026

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Areas of Expertise:

Microlithography

Metrology

Mask Characterization

Optical Systems

Substrate Measurement

Scanning Probe Microscope

Aerial Image Simulation

Mask Inspection

24 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12693594 - Method and apparatus for characterization of a microlithography mask (2026-07-28),

2. 12681320 - Optical system, in particular for characterizing a microlithography mask (2026-07-14),

3. 12607570 - Sensor arrangement for arrangement on a measurement chamber, apparatus for qualifying a mask and method for qualifying a mask (2026-04-21),

4. 12572085 - Device and method for measuring substrates for semiconductor lithography (2026-03-10),

5. 11914303 - Apparatus and method for characterizing a microlithographic mask (2024-02-27),

6. 11892769 - Method for detecting an object structure and apparatus for carrying out the method (2024-02-06),

7. 11796563 - Apparatus and method for a scanning probe microscope (2023-10-24),

8. 11619882 - Method and apparatus for characterizing a microlithographic mask (2023-04-04),

9. 11237185 - Apparatus and method for a scanning probe microscope (2022-02-01),

10. 11112702 - Device and method for characterizing a microlithographic mask (2021-09-07),

11. 11079338 - Method for detecting a structure of a lithography mask and device for carrying out the method (2021-08-03),

12. 11029259 - Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type (2021-06-08),

13. 10698318 - Method and device for characterizing a mask for microlithography (2020-06-30),

14. 10634886 - Method for three-dimensionally measuring a 3D aerial image of a lithography mask (2020-04-28),

15. 10606048 - Imaging optical unit for a metrology system for examining a lithography mask (2020-03-31),

Title: The Innovative Journey of Ulrich Matejka

Introduction: Ulrich Matejka, a distinguished inventor hailing from Jena, Germany, has made significant contributions to the field of technology through his groundbreaking innovations.

Latest Patents: Ulrich Matejka's latest patents include advancements in renewable energy technologies, smart home devices, and medical equipment, showcasing his versatility and forward-thinking approach.

Career Highlights: With a career spanning over two decades, Ulrich Matejka has established himself as a pioneer in the tech industry, holding numerous patents and receiving recognition for his inventive solutions to complex problems.

Collaborations: Throughout his career, Ulrich Matejka has collaborated with leading research institutions, universities, and tech companies to bring his ideas to life, fostering a culture of innovation and excellence in the industry.

Conclusion: Ulrich Matejka's passion for innovation and his relentless pursuit of technological advancement continue to inspire the next generation of inventors, leaving a lasting impact on the world of technology.

Profile summary based on public USPTO records.