This inventor holds 4 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2005-2008.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Taipei, TW (2007)
- Hsinchu, TW (2005 - 2008)
Company Filing History:
Years Active: 2005-2008
Title: Tzu-Jen Chou: Innovator in Semiconductor Technology
Introduction
Tzu-Jen Chou is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of chemical mechanical polishing processes. With a total of 4 patents to his name, Chou's work has had a substantial impact on the industry.
Latest Patents
Chou's latest patents include a polymeric particle slurry system and a method to reduce feature sidewall erosion. This innovative slurry system is designed for a chemical mechanical polishing (CMP) process. It comprises an aqueous dispersion that includes abrasive polymer-containing particles in an alkaline solution with a pH of less than about 9.5. The method involves providing a semiconductor wafer process surface that includes oxide-containing material and metal-filled semiconductor features. The polishing process utilizes this slurry system to effectively remove portions of the oxide material and the metal features.
Another notable patent involves copper interconnects in semiconductor substrates. This design features a first copper layer, on which an etch stop layer and a dielectric layer are formed. A second copper layer penetrates these layers to establish electrical connections with the first metal layer. The etch stop layer is characterized by a dielectric constant smaller than 3.5, while the dielectric layer has a dielectric constant smaller than 3.0.
Career Highlights
Chou is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Chou has collaborated with notable colleagues, including Syun-Ming Jang and Ying-Ho Chen. Their combined expertise has contributed to the development of innovative solutions in semiconductor technology.
Conclusion
Tzu-Jen Chou's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Ltd. highlight his role as a key innovator in the field. His advancements in chemical mechanical polishing processes and copper interconnects continue to influence the industry positively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile