Tung-Hung Feng

Title: The Innovative Mind of Tung-Hung Feng

Introduction

Tung-Hung Feng, an accomplished inventor based in Hsinchu, Taiwan, has made significant contributions to the field of semiconductor technology. With a total of six patents to his name, he has played a pivotal role in developing solutions that enhance the manufacturing processes in microelectronics.

Latest Patents

Among his notable inventions is a unique device designed for applying a magnetic field to a filter, aimed at reducing metallic contaminants during microcircuit fabrication. This innovative filter consists of a housing with a filter membrane that effectively removes metallic contaminants from solvents. The inclusion of a strategically positioned magnet generates a magnetic field, attracting these contaminants before they can penetrate the filter membrane. Notably, the magnetic field is stronger at the periphery of the filter housing, ensuring optimal contaminant removal.

Another significant patent relates to a method of manufacturing semiconductor devices, where a hydrophobic solvent is directed as a gas over a bevel region of a wafer. This method results in the deposition of a layer of the solvent on both the upper and lower bevels of the wafer. During processing, the layer of hydrophobic solvent effectively blocks off the photoresist material, enabling precise control over the semiconductor fabrication process.

Career Highlights

Feng is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading organization in the semiconductor industry. His work focuses on advancing innovative manufacturing techniques critical to producing high-quality semiconductor devices.

Collaborations

Throughout his career, Tung-Hung Feng has partnered with talented colleagues, including Hui-Chun Lee and Shih-Che Wang. These collaborations have enhanced the research and development efforts within their projects, leading to noteworthy advancements in semiconductor technology.

Conclusion

Tung-Hung Feng exemplifies the spirit of innovation and ingenuity within the semiconductor field. Through his six patents and collaborative efforts, he continues to push the boundaries of technology, paving the way for more efficient and effective semiconductor manufacturing processes. His contributions are invaluable to the industry, ensuring a brighter future for microelectronics.