The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2023

Filed:

Aug. 22, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Hsuan-Ying Mai, Taoyuan, TW;

Hui-Chun Lee, Changhua, TW;

Chun-Kuang Chen, Guanxi Township, TW;

Tung-Hung Feng, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 35/06 (2006.01); B01D 35/30 (2006.01); B03C 1/28 (2006.01); B03C 1/30 (2006.01);
U.S. Cl.
CPC ...
B01D 35/06 (2013.01); B01D 35/30 (2013.01); B03C 1/288 (2013.01); B03C 1/30 (2013.01); B03C 2201/18 (2013.01); B03C 2201/20 (2013.01); B03C 2201/22 (2013.01);
Abstract

A filter is used for removing metallic contaminants in a solvent used in microcircuit fabrication. The filter includes a filter housing including a filter membrane for filtering solvent including metallic contaminants, and a magnet arranged about the filter housing and configured to generate a magnetic field to attract the metallic contaminants prior to the metallic contaminants entering the filter membrane. The magnet is arranged such that the magnetic field of the magnet is greater in a periphery of the filter housing compared to a central portion of the filter housing.


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