The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Jun. 25, 2021
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Chun-Wei Liao, Taoyuan, TW;
Tung-Hung Feng, Hsinchu, TW;
Hui-Chun Lee, Hsinchu, TW;
Shih-Che Wang, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 9/00 (2006.01); B08B 3/04 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/311 (2006.01); G03F 1/80 (2012.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); G03F 1/80 (2013.01); H01L 21/31133 (2013.01); H01L 21/6708 (2013.01);
Abstract
A solvent recycle system minimizes chemical consumption used in various semiconductor processes. The solvent is recycled from a nozzle bath via the addition of buffer tank to connect the bath and circulation pumps. Improvements to the bath design further maintain solvent cleanness by preventing intrusion of particles and overflow conditions in the bath.