Location History:
- Woodstock, NY (US) (1978 - 1999)
- West Hurley, NY (US) (2001)
- Scottsdale, AZ (US) (2001 - 2010)
Company Filing History:
11 out of 10,307 
3 out of 3 
2 out of 106 Years Active: 1978-2010
Title: The Innovative Mind of Tugrul Yasar: Pioneering Semiconductor Technologies
Introduction
Tugrul Yasar is a prominent inventor based in Scottsdale, AZ, known for his contributions to the field of semiconductor technology. With an impressive portfolio of 16 patents, Yasar has established himself as a key player in the innovation of ionized physical vapor deposition (iPVD) techniques. His work focuses on advancing methodologies that improve the deposition and etching processes vital to semiconductor manufacturing.
Latest Patents
One of Tugrul Yasar's latest patents, titled "Ionized PVD with Sequential Deposition and Etching," details a sophisticated iPVD apparatus. This invention is designed to deposit materials onto semiconductor substrates by cycling between deposition and etch modes within a vacuum chamber. Yasar's invention carefully controls the static magnetic fields during various modes of operation. For etching processes, magnetic fields are minimized to less than 150 Gauss, typically under 50 Gauss, and ideally within the range of 0-10 Gauss. Contrastingly, during deposition, fields can exceed 150 Gauss and operate optimally around 20-30 Gauss.
Additionally, the apparatus utilizes differing pressure parameters for each mode—over 50 mTorr during the deposition and less than a few mTorr during etching. This innovative switching prevents overhang during feature creation, ensuring precision in high aspect ratio submicron features. Bias power significantly escalates during etching to yield several hundred volts, whereas lower values suffice for deposition, showcasing Yasar's mastery in managing the plasma dynamics through RF energy coupling.
Career Highlights
Throughout his career, Tugrul Yasar has garnered experience with reputable companies such as Tokyo Electron Limited and National Micronetics, Inc. His work in these organizations has enabled him to push forward the boundaries of semiconductor fabrication technologies while earning respect within the industry for his innovative solutions.
Collaborations
Working alongside notable colleagues such as Joseph T. Hillman and Glyn J. Reynolds, Yasar has successfully collaborated on various projects that have contributed to the advancement of semiconductor technology. Their combined expertise has fostered an environment ripe for innovation, resulting in a plethora of advancements in the hardware used across the industry.
Conclusion
Tugrul Yasar's inventive spirit in the realm of semiconductor technologies is evident through his numerous patents and collaborations. By focusing on enhancing iPVD techniques, he continues to play an essential role in shaping the future of semiconductor manufacturing. His dedication to innovation exemplifies the progress being made in this critical field, solidifying his status as a leading inventor.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.