Location History:
- Yamanashi, JP (2013)
- Miyagi, JP (2016 - 2021)
Company Filing History:
Years Active: 2013-2021
Title: Toshio Haga: Innovator in Plasma Processing Technology
Introduction
Toshio Haga is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His innovative work focuses on methods and apparatuses that enhance the efficiency and effectiveness of plasma processing.
Latest Patents
Haga's latest patents include a control method and plasma processing apparatus. This invention provides a method for controlling a plasma processing apparatus that includes a chamber for plasma generation, a substrate holder, and a radio frequency power supply. The method involves acquiring output impedance of the matching device when impedance matching is achieved, obtaining F-parameters that indicate the electrical characteristics of the chamber, calculating the degree of high harmonic component generation, and controlling the output impedance of the matching device based on this degree.
Another notable patent is a method for etching a layer to be etched. In this method, radicals generated from a processing gas are adsorbed to the layer without applying a high-frequency bias to the lower electrode during the adsorption step. The etching step follows, where ions from the processing gas are drawn into the layer by applying a high-frequency bias. This process alternates between adsorption and etching, optimizing the efficiency of the etching process.
Career Highlights
Toshio Haga is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop and refine his innovative ideas in plasma processing technology.
Collaborations
Haga collaborates with notable coworkers, including Hiromasa Mochiki and Yoshinobu Ooya. Their combined expertise contributes to the advancement of technology in their field.
Conclusion
Toshio Haga's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative methods continue to shape the future of plasma processing applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.