Toshihiro Hayami

Title: Innovations of Toshihiro Hayami

Introduction

Toshihiro Hayami is a notable inventor based in Hyogo, Japan. He has made significant contributions to the field of technology, particularly in plasma control and metal filling apparatuses. With a total of 4 patents to his name, Hayami's work showcases his expertise and innovative spirit.

Latest Patents

One of Hayami's latest inventions is a plasma control apparatus. This apparatus includes a power source unit, a resonance producing unit, and a voltmeter. The resonance producing unit features an LC circuit formed by a coil and a capacitor, which are connected to each other. A sensor is configured to detect the phase difference between the current flowing in and the voltage applied to the LC circuit. The capacitor in the LC circuit has a capacitance larger than the expected capacitance of the plasma. The power source unit is designed to control the magnitude of radio-frequency power supplied, aiming to bring the voltage measured with the voltmeter close to a set target voltage. Additionally, it controls the frequency of the radio-frequency power to minimize the phase difference detected by the sensor.

Another significant invention by Hayami is a metal filling apparatus. This apparatus minimizes the thickness of excess metal formed on an object while filling molten metal into minute spaces with openings on the object. The apparatus includes a table that holds a semiconductor wafer, a piston with a pressure portion facing the table, and a pressing mechanism that engages the piston onto the wafer. An airtight chamber is formed by the wafer on the table, the housing, and the piston. The apparatus features mechanisms that reduce pressure inside the chamber by exhausting gas, supply molten metal to the chamber, and introduce an inert gas into the chamber.

Career Highlights

Throughout his career, Toshihiro Hayami has worked with reputable companies such as SPP Technologies Co., Ltd. and Sumitomo Precision Products Co., Ltd. His experience in these organizations has contributed to his development as an inventor and innovator.

Collaborations

Hayami has collaborated with notable individuals in his field, including Ryosuke Fujii and Yukitaka Yamaguchi. These collaborations have likely enriched his work and led to further advancements in technology.

Conclusion

Toshihiro Hayami's contributions to the field of technology through his innovative patents demonstrate his commitment to advancing engineering solutions. His work