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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9199303 B1

PDFFull Text
Date of Patent:
Dec. 01, 2015

Filed:

Sep. 04, 2012

Metal filling apparatus

Applicants:

Yukitaka Yamaguchi, Hyogo, JP;

Toshiji Takigawa, Hyogo, JP;

Toshihiro Hayami, Hyogo, JP;

Osamu Imai, Hyogo, JP;

Inventors:

Yukitaka Yamaguchi, Hyogo, JP;

Toshiji Takigawa, Hyogo, JP;

Toshihiro Hayami, Hyogo, JP;

Osamu Imai, Hyogo, JP;

Assignee:

SUMITOMO Precision Products Co., Ltd., Hyogo, JP;

Attorney:

Miller, Matthias & Hull LLP

Primary Examiner:

Kevin E Yoon

Int. Cl.
CPC ...
B22D 19/00 (2006.01); B22D 45/00 (2006.01); B22D 18/02 (2006.01); B22D 19/08 (2006.01); B22D 39/02 (2006.01); H01L 21/67 (2006.01); H01L 21/768 (2006.01); C23C 6/00 (2006.01);
U.S. Cl.
CPC ...
B22D 18/02 (2013.01); B22D 19/00 (2013.01); B22D 19/08 (2013.01); B22D 39/02 (2013.01); C23C 6/00 (2013.01); H01L 21/67092 (2013.01); H01L 21/76898 (2013.01);
Abstract

A metal filling apparatus minimizes the thickness of excess metal formed on an object and fills molten metal into a minute space to have an opening on the object. A table holds a semiconductor wafer, piston has a pressure portion on a side facing the table, and a pressing mechanism engages the piston onto the wafer, and an airtight chamber is formed by the wafer on the table, housing, and piston. A mechanism reduces pressure inside the chamber by exhausting gas, a mechanism supplies molten metal to the chamber, and a mechanism supplies an inert gas into the chamber.

Find Patent Forward Citations

Yamaguchi, Yukitaka. (2015). Metal filling apparatus (U.S. Patent No. 9199303). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9199303

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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